发明名称 LASER SYSTEM FOR PROCESSING SOLAR WAFERS IN A CARRIER
摘要 An apparatus and method for processing the solar cell substrates is provided. In one embodiment, a laser firing chamber for processing solar cell substrates placed in a carrier, comprising a laser module located at a side of the carrier, the laser module being adapted to generate and direct multiple laser beams over an entire surface of a plurality of solar cell substrates, and a transport adapted to convey the carrier through an outputting region of the laser beams.
申请公布号 WO2011041267(A3) 申请公布日期 2011.08.04
申请号 WO2010US50414 申请日期 2010.09.27
申请人 APPLIED MATERIALS, INC.;AQUI, DEREK;ZUNIGA, STEVEN;SUBBARAMAN, VENKATESWARAN;LIEBSCHER, KIRK;ALEXANDER, JOHN;ZHANG, ZHENHUA;RANA, VIRENDRA V.S. 发明人 AQUI, DEREK;ZUNIGA, STEVEN;SUBBARAMAN, VENKATESWARAN;LIEBSCHER, KIRK;ALEXANDER, JOHN;ZHANG, ZHENHUA;RANA, VIRENDRA V.S.
分类号 H01L31/18;H01L31/042 主分类号 H01L31/18
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