| 摘要 |
PROBLEM TO BE SOLVED: To easily and accurately detect a crack of a substrate, while keeping costs low, in a substrate crack detecting device for detecting a crack formed in a substrate to be treated. SOLUTION: The device includes: a substrate transfer means 16 for transferring a substrate G in a horizontal line along a substrate transfer path 15; a laser radiation means 2 provided on one side of the substrate transfer path for radiating a line laser light L on the upper surface of the substrate transferred by the substrate transfer means from the obliquely upward direction with a prescribed angle, and for irradiating the upper surface of the substrate containing at least the right and left ends of the substrate with the line laser light along the substrate width direction; an imaging means 3 placed opposite to the laser radiation means with the substrate transfer path in between, for receiving the line laser light radiated from the laser radiation means; and a control means 20 for comparing an image taken by the imaging means with a reference image stored in advance, and for determining a substrate crack based on the comparison result. COPYRIGHT: (C)2011,JPO&INPIT
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