| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical scanner in which a short circuit of electrodes formed on the upper and the lower faces of a piezoelectric element due to a conductive adhesive is certainly prevented and the driving efficiency of the piezoelectric element is improved. SOLUTION: The optical scanner, which scans light in a predetermined direction by displacing and driving a mirror part around a rocking axis, includes: a substrate which has conductivity on the surface thereof and rockably supports the mirror part; the piezoelectric element which is bonded on the surface of the substrate and rocks the mirror part around the rocking axis; and a lower electrode formed on a surface opposite to the surface of the substrate of the piezoelectric element. The lower electrode of the piezoelectric element is bonded with an electric connection on the surface of the substrate by a conductive adhesive provided on inner side than the peripheral part of the piezoelectric element, and bonded to the surface of the substrate by an underfill material having insulation property provided on the periphery of the conductive adhesive. COPYRIGHT: (C)2011,JPO&INPIT
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