| 发明名称 |
APPARATUS FOR PREVENTING STICTION OF MEMS MICROSTRUCTURE |
| 摘要 |
An apparatus for preventing stiction of a three-dimensional MEMS (microelectromechanical system) microstructure, the apparatus including: a substrate; and a plurality of micro projections formed on a top surface of the substrate with a predetermined height in such a way that a cleaning solution flowing out from the microstructure disposed thereabove is discharged.
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| 申请公布号 |
US2011186089(A1) |
申请公布日期 |
2011.08.04 |
| 申请号 |
US20080672993 |
申请日期 |
2008.04.14 |
| 申请人 |
JE CHANG HAN;LEE MYUNG LAE;JUNG SUNG HAE;HWANG GUNN;CHOI CHANG AUCK |
发明人 |
JE CHANG HAN;LEE MYUNG LAE;JUNG SUNG HAE;HWANG GUNN;CHOI CHANG AUCK |
| 分类号 |
B08B3/00 |
主分类号 |
B08B3/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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