| 摘要 |
The present invention relates to the photovoltaic modules and specially to forming thin-film photovoltaic cells by sputter depositing a cadmium sulfide layer using an electrically conductive cadmium sulfide sputtering target. A method of forming an electrically conductive cadmium sulfide sputtering target comprising: providing cadmium sulfide material; providing at least one dopant material; combining the cadmium sulfide material and the at least one dopant material into a homogeneous mixture and consolidating the mixture into the electrically conductive cadmium sulfide sputtering target, the homogeneous mixture having a dopant material content of 100 ppm to 4000 ppm. |
