发明名称 METHODS OF FORMING DIODES
摘要 <p>Some embodiments include methods of forming diodes. A stack may be formed over a first conductive material. The stack may include, in ascending order, a sacrificial material, at least one dielectric material, and a second conductive material. Spacers may be formed along opposing sidewalls of the stack, and then an entirety of the sacrificial material may be removed to leave a gap between the first conductive material and the at least one dielectric material. In some embodiments of forming diodes, a layer may be formed over a first conductive material, with the layer containing supports interspersed in sacrificial material. At least one dielectric material may be formed over the layer, and a second conductive material may be formed over the at least one dielectric material. An entirety of the sacrificial material may then be removed.</p>
申请公布号 EP2351089(A2) 申请公布日期 2011.08.03
申请号 EP20090829614 申请日期 2009.10.28
申请人 MICRON TECHNOLOGY, INC. 发明人 SANDHU, GURTEJ, S.;SRINIVASAN, BHASKAR
分类号 H01L29/861 主分类号 H01L29/861
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