COOLING SYSTEM AND APPARATUS FOR MANUFACTURING SILICON SINGLE CRYSTAL INGOT COMPRISING THE SAME

摘要

PURPOSE: A cooling system and an apparatus for manufacturing a silicon single crystal ingot including the same are provided to not only reduce the time to cool an ingot but also increase cooling speed by widening an entire area which absorbs the heat emitted from the ingot. CONSTITUTION: A cooling pipe(70) surrounds a single crystal ingot(101) for cooling the single crystal ingot which grows from silicon solution(100). An extension part(80) is arranged in the bottom part of the cooling pipe to extend the side which absorbs the heat of the single crystal ingot. The extension part is made from graphite and is a funnel shape. A seating part is formed in the bottom part of the cooling pipe. A sensing part senses the single crystal ingot using infrared ray. An incised part is formed by incising a part of the extension part.