发明名称 |
System and method for detecting non-cathode arcing in a plasma generation apparatus |
摘要 |
A system and method for detecting the potential of non-cathode arcing in a plasma generation apparatus, such as a physical vapor deposition chamber. The system and method involve computing a statistical parameter of cathode-arcing event data in the chamber and performing a pattern recognition technique to a moving average of the statistical parameter.
|
申请公布号 |
US7988833(B2) |
申请公布日期 |
2011.08.02 |
申请号 |
US20070855850 |
申请日期 |
2007.09.14 |
申请人 |
SCHNEIDER ELECTRIC USA, INC. |
发明人 |
KRAUSS ALAN F. |
分类号 |
C23C14/34 |
主分类号 |
C23C14/34 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|