发明名称 MULTI-GATE III-V QUANTUM WELL STRUCTURES
摘要 Methods of forming microelectronic structures are described. Embodiments of those methods include forming a III-V tri-gate fin on a substrate, forming a cladding material around the III-V tri-gate fin, and forming a hi k gate dielectric around the cladding material.
申请公布号 WO2011090577(A2) 申请公布日期 2011.07.28
申请号 WO2010US59395 申请日期 2010.12.08
申请人 INTEL CORPORATION;PILLARISETTY, RAVI;KAVALIEROS, JACK;MUKHERJEE, NILOY;RADOSAVLJEVIC, MARKO;CHAU, ROBERT S.;SHAH, UDAY;DEWEY, GILBERT;RAKSHIT, TITASH;METZ, MATHEW V. 发明人 PILLARISETTY, RAVI;KAVALIEROS, JACK;MUKHERJEE, NILOY;RADOSAVLJEVIC, MARKO;CHAU, ROBERT S.;SHAH, UDAY;DEWEY, GILBERT;RAKSHIT, TITASH;METZ, MATHEW V.
分类号 H01L21/8238;H01L21/336;H01L29/78 主分类号 H01L21/8238
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