| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a radiation measurement apparatus for simultaneously and independently calculating the film thicknesses of a plurality of layers by combining a single radiation source and different scintillators. <P>SOLUTION: In the radiation measurement apparatus for irradiating a measurement target with a radiation emitted from the same radiation source; transmitting it through the measurement target; and measuring the physical quantity of the measurement target from the quantity of the transmitted radiation, the transmitted radiation is detected by different types of detectors whose materials and thicknesses are different. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
