发明名称 METHOD FOR MANUFACTURING IMPRINT FILM
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing an imprint film of high heat resistance with high efficiency without using photo-curable resin such as ultraviolet-cured resin. SOLUTION: The method for manufacturing the imprint film includes: a process for bringing an aromatic polymer film into contact with an organic solvent by dipping, dripping, coating, printing, or the like to soften the aromatic polymer film; and a process bringing the aromatic polymer film into contact with a template by mechanical pressing using a pressing machine, a roll, or the like, pressing with gas, pressure reduction, pressing by own weight, or the like. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011143598(A) 申请公布日期 2011.07.28
申请号 JP20100005626 申请日期 2010.01.14
申请人 TORAY IND INC 发明人 MORIYAMA HIDEKI
分类号 B29C59/02;B29K77/00;C08G69/32;H01L21/027 主分类号 B29C59/02
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