发明名称 THERMAL DETECTOR, THERMAL DETECTOR DEVICE, ELECTRONIC INSTRUMENT, AND METHOD OF MANUFACTURING THERMAL DETECTOR
摘要 The thermal detector includes a support member supported on a substrate. The support member has a mounting portion supporting a thermal detector element, and at least one arm portion connected at one end to the mounting portion and connected at the other end to the substrate. At least one of the mounting portion and the at least one arm portion has a first member disposed towards the substrate, a transverse width of a transverse cross-sectional shape of the first member set to a first width; a second member disposed toward the thermal detector element and facing the first member, a transverse width of the second member set to the first width; and a third member linking the first member and the second member, a transverse width of the third member set to a second width that is smaller than the first width.
申请公布号 US2011180713(A1) 申请公布日期 2011.07.28
申请号 US201113013124 申请日期 2011.01.25
申请人 SEIKO EPSON CORPORATION 发明人 NODA TAKAFUMI
分类号 H01L27/14;B23P11/00 主分类号 H01L27/14
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