| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an epochal thin film coating apparatus which can attain a double-sided coating which can form a thin film continuously with high accuracy and speedily before drying, can reduce, particularly, damage to a metal film (an object 5 to be coated) which turns to a substrate in manufacturing a lithium ion battery formation material, a deviation of a dimensional accuracy due to wears of an end contact part of a nozzle part, a need and the frequency of an exchange or realignment, and defects due to generation-mixing-in of abrasion powders, and accordingly, can achieve manufacture of the lithium ion battery forming material by the double-sided coating which can be carried out speedily, and a double-sided thin film coating apparatus. <P>SOLUTION: In the thin film coating apparatus, the end contact part 6 of the nozzle part 4 in slide-contact with the object 5 to be coated is formed with ceramics, superhard metal, or molybdenum. <P>COPYRIGHT: (C)2011,JPO&INPIT |
