| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow monitor which enables automatic sensing of a parameter equivalent to a flow rate of a liquid, and a functional liquid supply device equipped with the monitor. SOLUTION: The flow monitor has: a case 15 having an inflow port 13 and an outflow port 14; a rotor 12 held in the case 15; a detection object disk (detection object part) 16 so provided as to be along the end face of the case 15 and rotating with the rotor 12 used as a power source; and an optical sensor 18 facing the detection object disk 16 and detecting the rotational frequency of the rotor 12. COPYRIGHT: (C)2011,JPO&INPIT |
