| 摘要 |
PROBLEM TO BE SOLVED: To provide a vapor deposition material capable of manufacturing an oxide film containing strontium and calcium under a stable condition by a physical vapor growth method such as an electron beam vapor deposition method, with low hygroscopicity. SOLUTION: The vapor deposition material is a polycrystal formed of crystal particles of an oxide containing strontium and calcium in a ratio of 0.2:0.8-0.8:0.2 range by molar ratio, and contains one kind or more of metal elements selected from a group of silicon, aluminum, titanium, zirconium, and a rare earth element in a quantity in the range of 0.0005-20 mol when the total of molar quantity of strontium and the molar quantity of calcium is made 100 mol, and the average pore diameter is in the range 0.01-0.50 μm. COPYRIGHT: (C)2011,JPO&INPIT
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