| 摘要 |
PURPOSE: A nano focusing device with surface plasmon polariton waveguide and a nano plasmon integrated circuit module using the same are provided to overcome a light diffraction limit of a light signal inputted through an input terminal, thereby converting the inputted light signal into a small mode of nano-size. CONSTITUTION: A dielectric layer is arranged in the separated space between a first metal layer and a second metal layer. An input terminal(100a) with IMI type structure comprises the first metal layer which is formed the dielectric layer in the inner and outer side. A mid-stage(100b) with IMIMI type structure comprises the first metal layer which is extended, and the second metal layer which is separately placed with the first metal layer. The dielectric layer is formed at the mid-stage in the outside of the first metal layer, the outside of the second metal layer, and the inner side of the first metal layer and the second metal layer. An output terminal(100c) with MIM type structure comprises the first metal layer at the mid-stage which is extended, the second metal layer at the mid-stage which is extended, and the dielectric layer in the inner side of the first metal layer and the second metal layer.
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