发明名称 TURBOMOLECULAR PUMP
摘要 A turbomolecular pump comprises a rotor element (12) disposed in a pump housing (18). The rotor element (12) is surrounded by a stator element (24). An intermediate chamber (36) is provided between the stator element (24) and the pump housing (18). An energy absorption element (44) is disposed in the intermediate chamber (36) for the purposes of absorbing energy in case of a bursting of the rotor element (12).
申请公布号 EP2347134(A1) 申请公布日期 2011.07.27
申请号 EP20090751922 申请日期 2009.11.13
申请人 OERLIKON LEYBOLD VACUUM GMBH 发明人 ENGLAENDER, HEINRICH;HAS, STEFAN;RICHTER, MICHAEL;ROTH, ISHAN
分类号 F04D19/04;F01D21/04;F04D29/52 主分类号 F04D19/04
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