PROJECTION OPTICAL SYSTEM, EXPOSURE EQUIPMENT AND DEVICE MANUFACTURING METHOD,申请号EP20060713513-传众专利搜索

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发明名称	PROJECTION OPTICAL SYSTEM, EXPOSURE EQUIPMENT AND DEVICE MANUFACTURING METHOD
摘要
申请公布号	EP1860477(B1)	申请公布日期	2011.07.27
申请号	EP20060713513	申请日期	2006.02.10
申请人	NIKON CORPORATION	发明人	TAKAHASHI, TOMOWAKI
分类号	G02B17/06;G03F7/20;H01L21/027	主分类号	G02B17/06
代理机构		代理人
主权项
地址

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