| 摘要 |
<p>PURPOSE: A laser dicing device is provided to ensure a uniform dicing shape even if the relative speed of a substrate and a pulse laser beam changes. CONSTITUTION: A laser dicing device(10) comprises a stage unit(20), a reference-clock oscillating circuit(28), a laser oscillator(12), a pulse picker(14), a pulse-picker control unit(24), a processing table unit(30), a speed input(40) and a calculating unit(42). A substrate is loaded on the stage. The reference-clock oscillating circuit generates clock signals. The laser oscillator emits pulse laser beams. A laser-oscillator control unit synchronizes the pulse laser beams with clock signals. The pulse picker converts the irradiation and non-irradiation of the pulse laser beam to the substrate.</p> |
