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经营范围
发明名称
LITHOGRAPHY SYSTEM WITH LENS ROTATION.
摘要
申请公布号
NL1037639(C)
申请公布日期
2011.07.25
申请号
NL20101037639
申请日期
2010.01.21
申请人
MAPPER LITHOGRAPHY IP B.V.
发明人
PEIJSTER, JERRY
分类号
H01J37/20;H01J37/317
主分类号
H01J37/20
代理机构
代理人
主权项
地址
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