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发明名称
PLASMA CVD APPARATUS
摘要
申请公布号
KR20110084530(A)
申请公布日期
2011.07.25
申请号
KR20117013488
申请日期
2010.01.12
申请人
ULVAC, INC.
发明人
ARAI SUSUMU;ETO KENJI
分类号
C23C16/44;C23C16/50;H01L21/205;H01L21/31
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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