| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laminating apparatus having a hot plate that makes it possible to keep temperature in a workpiece being laminated uniform. <P>SOLUTION: The laminating apparatus is characterized by comprising: an upper chamber and a lower chamber divided by a pressing member, wherein a workpiece 10 is disposed on a hot plate 20 arranged in the lower chamber, and the workpiece 10 heated by the hot plate 20 is laminated by compressing between the hot plate 20 and the pressing member after the lower chamber is evacuated and the atmosphere is introduced into the upper chamber. The apparatus is also characterized in that a plurality of heating units consisting of a heater or pair of a heater 203 and heat pipe 204 combined are disposed inside the hot plate 20, and one or more temperature sensors 207 are disposed for every one set or more sets of a heater or pair of the heater and heat pipe combined are disposed there, for the purpose of controlling a temperature of the plurality of heaters separately, thereby making it possible to keep temperature in the hot plate and workpiece uniform. <P>COPYRIGHT: (C)2011,JPO&INPIT |
