发明名称 DIVIDING METHOD
摘要 <p><P>PROBLEM TO BE SOLVED: To prevent a machine from stopping operation due to an alignment error etc. resulting from absence of a workpiece at a predetermined position, when workpieces forming a workpiece set such that the workpieces less than a predetermined number are united with one annular frame, are divided. <P>SOLUTION: When the respective workpieces forming the workpiece set 11 such that two or more workpieces W1, W2 and W3 are united with the one annular frame F, are divided, before detecting a division-plan line in each of workpieces arranged at the respective predetermined positions in the annular frame F, automatic focusing on focus regions 101, 102, 103, 104 is performed assuming that the workpieces are present at respective predetermined positions, determination about whether or not the workpieces are present in accordance with whether or not to come into focus, is performed to store the determination in a storage module, and detection of a division-plan line S is not performed for a position where it is determined that the workpieces are absent. <P>COPYRIGHT: (C)2011,JPO&INPIT</p>
申请公布号 JP2011142126(A) 申请公布日期 2011.07.21
申请号 JP20100000514 申请日期 2010.01.05
申请人 DISCO ABRASIVE SYST LTD 发明人 TANAKA MAKOTO
分类号 H01L21/301 主分类号 H01L21/301
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