METHOD OF MANUFACTURING RADIATION-SENSITIVE COMPOSITION AND METHOD OF CONTROLLING FILM THICKNESS OF RESIST FILM

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a radiation-sensitive composition which manufactures a resist film having a film thickness complying with a target film thickness and exhibits a performance of the resist film as it is designed.

SOLUTION: The method of manufacturing the radiation-sensitive composition is provided, and includes the process for condensing or diluting a preliminary composition of the radiation-sensitive composition by using a solvent to achieve a particular refractive index based on a correlation relationship between the film thickness of a standard resist film manufactured under a fixed condition by using a standard composition and the refractive index of the standard composition, and for obtaining the radiation-sensitive composition for manufacturing the resist film having the particular film thickness.

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