发明名称 STRAINED CMOS DEVICE, CIRCUIT AND METHOD OF FABRICATION
摘要 A semiconductor device and fabrication method include a strained semiconductor layer having a strain in one axis. A long fin and a short fin are formed in the semiconductor layer such that the long fin has a strained length along the one axis. An n-type transistor is formed on the long fin, and a p-type transistor is formed on the at least one short fin. The strain in the n-type transistor improves performance.
申请公布号 US2011175166(A1) 申请公布日期 2011.07.21
申请号 US20100689339 申请日期 2010.01.19
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 BEDELL STEPHEN W.;CHENG KANGGUO;DORIS BRUCE B.;KHAKIFIROOZ ALI;SADANA DEVENDRA K.;SHAHIDI GHAVAM G.
分类号 H01L27/12;H01L21/782 主分类号 H01L27/12
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