OPTICAL HEATER FOR CRYOGENIC ION IMPLANTER SURFACE REGENERATION

摘要

In an ion implanter, one or more optica! heaters are disposed above a pair of support arms, The support arms have an engaged positioned which is disposed beneath a platen and a retractable position displaced vertically away from the platen and rotated away from the platen in a direction parallel to a pianar surface thereof. When the support arms are in the retracted position, the one or more opticai heaters is configured to provide optica! energy Incident on surfaces of the cooiing pads disposed on the support arms for removal of unwanted materials thereon. In this manner, the optical heaters are used during a regeneration cycie of cryogenic surfaces in an ion implanter.