| 摘要 |
PROBLEM TO BE SOLVED: To provide a silicon material stably applied to an evaporation source, generating splash as less as possible. SOLUTION: In the bar-like silicon material used for feeding silicon to the evaporation source upon manufacturing a thin film, a plurality of first regions, each of which is surrounded by a grain boundary, are present at positions of 90% of the length from the center toward the outer circumference on a cross-section perpendicular to the long axis direction of the material, a plurality of second regions, each of which is surrounded by a grain boundary, are present at positions of 50% of the length from the center toward the outer circumference, the area weighted average value of the long diameters of the first regions is 200μm or less, and the area weighted average value of the long diameters of the second regions is 1,000μm or more. COPYRIGHT: (C)2011,JPO&INPIT
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