Capacitive ceramic pressure sensor i.e. absolute pressure sensor, for container opening to measure absolute pressure on measuring membrane, has electrode and counter electrode between which space is formed and smaller than joint thickness

摘要

The sensor has a metallic joint (7) that connects an outer rim of a measuring membrane (5) with an outer rim of a base body (1). A capacitor is formed by an electrode (9) and a counter electrode (11), where capacitance of the capacitor is provided as a measure for pressure-dependent deformation of the membrane. The body is projected inside a measuring chamber (3). A space between the electrode applied on a surface area of the body and the counter electrode applied on the membrane is smaller than thickness (d) of the joint. The body and the membrane consist of ceramic.