发明名称 SOLUTION FOR INCREASING WAFER SHEET RESISTANCE AND/OR PHOTOVOLTAIC CELL POWER DENSITY LEVEL.
摘要 <p>Treating thin film amorphous or mono- or multi-crystalline silicon wafer substrate for use in a photovoltaic cell, the wafer substrate having at least one of a pn- or np junction and a partial phosphosilicate or borosilicate glass layer on a top surface of the wafer substrate, to increase at least one of (a) the sheet resistance of the wafer and (b) the power density level of the photovoltaic cell made from said wafer. The treatment solution being an acidic treatment solution of a buffered oxide etch (BOE) solution of at least one tetraalkylammonium hydroxide, acetic acid, at least one non-ionic surfactant, at least one metal chelating agent, a metal free source of ammonia, a metal free source of fluoride ions, and water, mixed with an oxidizer solution and optionally water.</p>
申请公布号 MX2011007413(A) 申请公布日期 2011.07.21
申请号 MX20110007413 申请日期 2010.01.11
申请人 AVANTOR PERFORMANCE MATERIALS B.V. 发明人 JOANNES T.V. HOOGBOOM;JOHANNES A.E. OOSTERHOLT;SABRINA RITMEIJER;LUCAS M.H. GROENEWOUD
分类号 C11D3/39;C11D7/32;C11D11/00;H01L21/02;H01L21/3213;H01L31/068;H01L31/18 主分类号 C11D3/39
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