发明名称 MANUFACTURING METHOD FOR ORGANIC THIN FILM PATTERN AND THE MANUFACTURING METHOD FOR ORGANIC LIGHT EMITTING DISPLAY APPARATUS
摘要 PURPOSE: A method for forming a thin organic film and a method for manufacturing an organic light emitting display device are provided to form a thin organic film pattern by controlling the shape of light energy, thereby forming the thin organic film pattern with high resolution. CONSTITUTION: A thin dummy organic film(120) is formed on a substrate(110). The thin dummy organic film is selectively eliminated by irradiating light energy to the thin dummy organic film. A main thin organic film(130) is formed the substrate and the dummy organic film. The sublimation temperature of the main thin organic film is higher than the sublimation temperature of the dummy organic film. The dummy organic film and the main thin organic film are eliminated by sublimating the dummy organic film by heating the dummy organic film and the main thin organic film.
申请公布号 KR20110083093(A) 申请公布日期 2011.07.20
申请号 KR20100003130 申请日期 2010.01.13
申请人 SAMSUNG MOBILE DISPLAY CO., LTD. 发明人 LEE, KANG IL;CHOI, YONG SUP;ROH, CHEOL LAE
分类号 H01L51/56 主分类号 H01L51/56
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