发明名称 APPARATUS AND METHOD FOR TESTING OF SEMICONDUCTOR CHIP, APPARATUS AND METHOD FOR SORTING OF SEMICONDUCTOR CHIP USING THE SAME
摘要 PURPOSE: A method and device for testing a semiconductor chip and a device and method for classifying a semiconductor using the same are provided to improve yield by excluding a semiconductor chip of a fault by performing a test about a semiconductor chip which is divided from a wiper. CONSTITUTION: A rotation plate(610) rotates with a rotary unit. A plurality of chip seating modules is installed in the rotation plate in a regular interval. According to rotation of the rotation plate, a plurality of chip seating modules is transferred to a chip loading location and a semiconductor chip cut from the semiconductor substrate is settled. A first test module(630) tests electrical characteristics of the semiconductor chip settled in the chip seating module. A second test module(640) tests optical characteristics of thee semiconductor chip settled to the second test location in the provided chip seating module.
申请公布号 KR101050941(B1) 申请公布日期 2011.07.20
申请号 KR20100035084 申请日期 2010.04.16
申请人 KIM, DAE JUN 发明人 KIM, DAE JUN
分类号 G01R31/26;H01L21/66 主分类号 G01R31/26
代理机构 代理人
主权项
地址