发明名称 |
Method of forming thermal bend actuator with connector posts connected to drive circuitry |
摘要 |
A method of forming a thermal bend actuator in an inkjet nozzle assembly. The method includes: depositing sidewalls and a roof layer to define a nozzle chamber; defining first and second vias in one sidewall to reveal first and second electrodes; filling the vias with a conductive material using electroless plating to provide first and second connector posts; depositing an active beam material onto the roof layer; etching the active beam material to define a planar active beam member comprising a bent or serpentine beam element; and etching the roof layer to define the thermal bend actuator.
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申请公布号 |
US7980666(B2) |
申请公布日期 |
2011.07.19 |
申请号 |
US20100972506 |
申请日期 |
2010.12.19 |
申请人 |
SILVERBROOK RESEARCH PTY LTD |
发明人 |
MCAVOY GREGORY JOHN;SILVERBROOK KIA |
分类号 |
B41J2/16;B41J2/135;G01D15/00;H01L21/00 |
主分类号 |
B41J2/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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