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发明名称
VOLUMENLEBENSDAUERMESSUNG
摘要
申请公布号
AT514095(T)
申请公布日期
2011.07.15
申请号
AT20070291091T
申请日期
2007.09.11
申请人
S.O.I. TEC SILICON ON INSULATOR TECHNOLOGIES
发明人
ALLIBERT, FREDERIC;KONONCHUK, OLEG
分类号
G01R31/265;H01L21/66
主分类号
G01R31/265
代理机构
代理人
主权项
地址
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