发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 According to one embodiment, a semiconductor device includes a first semiconductor layer of a first conductivity type and a second semiconductor layer of a second conductivity type. The first semiconductor layer is formed with a trench. The second semiconductor layer is buried in the trench, and includes a hollow portion. A length of the hollow portion along depth direction of the trench is 5 μm or less or 15 μm or more.
申请公布号 US2011169081(A1) 申请公布日期 2011.07.14
申请号 US20110986821 申请日期 2011.01.07
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 ISHIKAWA HIRONORI;SATO SHINYA;SUGAYA HIROYUKI;SAKUMA TOMOYUKI
分类号 H01L29/68;H01L21/20 主分类号 H01L29/68
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