| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a highly responsive and accurate thermal gas sensor for analysis of a gas based on a change in the thermal conductivity. <P>SOLUTION: The thermal gas sensor includes: a substrate 2 having a cavity 5; a thin film support 6 laminated in the cavity, and formed by a plurality of insulating layers 8a, 8b; and first and second heating elements 3, 4 put between the insulating layers in the thin film support. The second heating element is disposed around the first heating element to keep the first heating element controlled so as to be at a temperature higher than the second heating element, so that a concentration of the ambient gas is measured based on power applied to the first heating element. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
