发明名称 ALLEVIATION OF LASER-INDUCED DAMAGE IN OPTICAL MATERIALS BY SUPPRESSION OF TRANSIENT COLOR CENTERS FORMATION AND CONTROL OF PHONON POPULATION
摘要 Laser-induced damage in an optical material can be mitigated by creating conditions at which light absorption is minimized. Specifically, electrons populating defect energy levels of a band gap in an optical material can be promoted to the conduction band - a process commonly referred to as bleaching. Such bleaching can be accomplished using a predetermined wavelength that ensures minimum energy deposition into the material, ideally promoting electron to just inside the conduction band. In some cases phonon (i.e. thermal) excitation can also be used to achieve higher depopulation rates. In one embodiment, a bleaching light beam having a wavelength longer than that of the laser beam can be combined with the laser beam to depopulate the defect energy levels in the band gap. The bleaching light beam can be propagated in the same direction or intersect the laser beam.
申请公布号 WO2011084927(A2) 申请公布日期 2011.07.14
申请号 WO2011US20054 申请日期 2011.01.03
申请人 KLA-TENCOR CORPORATION;DRIBINSKI, VLADIMIR;CHUANG, YUNG-HO ALEX 发明人 DRIBINSKI, VLADIMIR;CHUANG, YUNG-HO ALEX
分类号 H01S3/10;H01S3/113 主分类号 H01S3/10
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