发明名称 DIELECTRIC SPACERS FOR METAL INTERCONNECTS AND METHOD TO FORM THE SAME
摘要 A plurality of metal interconnects incorporating dielectric spacers and a method to form such dielectric spacers are described. In one embodiment, the dielectric spacers adjacent to neighboring metal interconnects are discontiguous from one another. In another embodiment, the dielectric spacers may provide a region upon which un-landed vias may effectively land.
申请公布号 US2011171823(A1) 申请公布日期 2011.07.14
申请号 US201113069253 申请日期 2011.03.22
申请人 HUSSEIN MAKAREM A;BOYANOV BOYAN 发明人 HUSSEIN MAKAREM A.;BOYANOV BOYAN
分类号 H01L21/28 主分类号 H01L21/28
代理机构 代理人
主权项
地址