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发明名称
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要
申请公布号
US2011171778(A1)
申请公布日期
2011.07.14
申请号
US201113071629
申请日期
2011.03.25
申请人
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
发明人
TAMURA TOMOKO;SUGIYAMA EIJI;DOZEN YOSHITAKA;DAIRIKI KOJI;TSURUME TAKUYA
分类号
H01L21/50;H01L21/56
主分类号
H01L21/50
代理机构
代理人
主权项
地址
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