发明名称 |
THIN FILM DEPOSITION APPARATUS, METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE APPARATUS, AND ORGANIC LIGHT-EMITTING DISPLAY DEVICE MANUFACTURED BY USING THE METHOD |
摘要 |
A thin film deposition apparatus, a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus, and an organic light-emitting display device manufactured by using the method. The thin film deposition apparatus includes: a deposition source that discharges a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet disposed opposite to the deposition source nozzle unit and including a plurality of patterning slits having different lengths arranged in the first direction; and a barrier plate assembly disposed between the deposition source nozzle unit and the patterning slit sheet in the first direction, and including a plurality of barrier plates that partition a space between the deposition source nozzle unit and the patterning slit sheet into a plurality of sub-deposition spaces, wherein the thin film deposition apparatus is separated from the substrate by a predetermined distance, and the thin film deposition apparatus and the substrate are movable relative to each other.
|
申请公布号 |
US2011168986(A1) |
申请公布日期 |
2011.07.14 |
申请号 |
US20110987569 |
申请日期 |
2011.01.10 |
申请人 |
SAMSUNG MOBILE DISPLAY CO., LTD. |
发明人 |
LEE YUN-MI;KIM SANG-SOO;JO CHANG MOG;PARK HYUN-SOOK |
分类号 |
H01L51/52;H01L51/56 |
主分类号 |
H01L51/52 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|