APPARATUS SUITABLE FOR CONTACTING GASES AT HIGH TEMPERATURE

摘要

PROBLEM TO BE SOLVED: To provide an apparatus suitable for contacting gases at high temperature, such as hydrogen with tetrachlorosilane.

SOLUTION: A reactor 100 is used for hydrogenating tetrachlorosilane. The reactor 100 has at least one part fabricated from a silicon carbide-based material of construction. The reactor 100 includes: a pressurizable shell 101; a thermal insulator 102 surrounded by the pressurizable shell 101; a heating element 106 surrounded by the thermal insulator 102; and a reaction chamber 107 surrounded by the heating element 106.

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