| 摘要 |
<p>PURPOSE: An apparatus for transferring a substrate is provided to reduce manufacturing costs for the device since there is no additional device for transferring the substrate in transfer section. CONSTITUTION: In an apparatus for transferring a substrate, a rotary unit(110) rotates the substrate(10) while supporting the substrate. A transfer unit(120) transfers a rotary unit in horizontal direction. The rotary unit rotates the substrate which is transferred by the transfer unit.</p> |
