发明名称 |
DRYER FOR SOLAR WAFER CLEANER |
摘要 |
PURPOSE: A dry device for a solar battery wafer cleaning device is provided to shorten wafer drying time, thereby drastically increasing production. CONSTITUTION: A wafer is placed and dried in a chamber structure(100). A swing nozzle(200) has a pipe structure. The swing nozzle is supported by the chamber structure. The wafer in the chamber structure is dried by air. A swing driving device(300) is placed in the chamber structure and rotates the swing nozzle. |
申请公布号 |
KR20110080661(A) |
申请公布日期 |
2011.07.13 |
申请号 |
KR20100000993 |
申请日期 |
2010.01.06 |
申请人 |
KOREA POLYTECHNIC UNIVERSITY INDUSTRY ACADEMIC COOPERATION FOUNDATION |
发明人 |
KANG, CHAN HYOUNG;MIN, JAE GI |
分类号 |
H01L31/18;H01L31/04 |
主分类号 |
H01L31/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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