发明名称 DRYER FOR SOLAR WAFER CLEANER
摘要 PURPOSE: A dry device for a solar battery wafer cleaning device is provided to shorten wafer drying time, thereby drastically increasing production. CONSTITUTION: A wafer is placed and dried in a chamber structure(100). A swing nozzle(200) has a pipe structure. The swing nozzle is supported by the chamber structure. The wafer in the chamber structure is dried by air. A swing driving device(300) is placed in the chamber structure and rotates the swing nozzle.
申请公布号 KR20110080661(A) 申请公布日期 2011.07.13
申请号 KR20100000993 申请日期 2010.01.06
申请人 KOREA POLYTECHNIC UNIVERSITY INDUSTRY ACADEMIC COOPERATION FOUNDATION 发明人 KANG, CHAN HYOUNG;MIN, JAE GI
分类号 H01L31/18;H01L31/04 主分类号 H01L31/18
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