发明名称 COMPOSITION FOR IMPRINTS, PATTERN AND PATTERNING METHOD
摘要 <p>A composition for imprints comprising a polymerizable monomer, a photopolymerization initiator, and a polymer having a functional group with at least one of a fluorine atom or a silicon atom and having a polymerizable functional group, wherein the polymer has a weight-average molecular weight of at least 2000 and the amount of the polymer is from 0.01 to 20% by mass relative to the polymerizable monomer, is excellent in patternability and mold releasability, capable of forming good patterns and free from a problem of mold contamination.</p>
申请公布号 EP2342243(A1) 申请公布日期 2011.07.13
申请号 EP20090752900 申请日期 2009.10.29
申请人 FUJIFILM CORPORATION 发明人 KODAMA, KUNIHIKO
分类号 C08F259/08;C08F265/06;C08F275/00;C08F279/00;G03F7/00;G03F7/004;G03F7/033;G03F7/038;G03F7/075 主分类号 C08F259/08
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