| 摘要 |
<p>A SACP (selected area channeling pattern) method comprising: directing a beam (9) of charged particles onto an object surface (23) of an object (25) using a particle optical system (1); and detecting intensities of particles emanating from the object; wherein the method comprises: (a1) adjusting an excitation of a second beam deflector (17,19) for adjusting an impingement location (29) of the beam on the object surface; (a2) adjusting an excitation of a first beam deflector (11,13) for adjusting an angle (¨) of incidence of the beam on the object surface without changing the impingement location and detecting the intensity; and (a3) repeating the adjusting of the excitation of the first beam deflector for adjusting the angle of incidence without changing the impingement location such that a corresponding intensity is detected (35) for each of at least 100 different angles of incidence at the same impingement location. The application also relates to a charged particle optical system (1) for performing the method.</p> |
