发明名称 |
SAWING APPARATUS OF SINGLE CRYSTAL AND CONTROLING METHOD OF THE SAME |
摘要 |
PURPOSE: A mono-crystal ingot cutting apparatus and a control method thereof are provided to reduce deviation among workers by controlling blade deflection based on the amount of coolant and to reduce down time. CONSTITUTION: A blade(120) cuts an ingot. A plurality of rollers rotates the blade. A plurality of nozzles sprays a cleansing solution on the blade. A plurality of constant pressure units are arranged at both sides of the blade. A distance measuring sensor measures the distance between the blade and the constant pressure unit. A control device controls the amount of sprayed cleansing liquid at each nozzle according to the measured distance.
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申请公布号 |
KR20110080338(A) |
申请公布日期 |
2011.07.13 |
申请号 |
KR20100000514 |
申请日期 |
2010.01.05 |
申请人 |
LG SILTRON INCORPORATED |
发明人 |
KIM, WOO TAE;KIM, YUN IL;NA, GWANG HA |
分类号 |
H01L21/20 |
主分类号 |
H01L21/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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