发明名称 SAWING APPARATUS OF SINGLE CRYSTAL AND CONTROLING METHOD OF THE SAME
摘要 PURPOSE: A mono-crystal ingot cutting apparatus and a control method thereof are provided to reduce deviation among workers by controlling blade deflection based on the amount of coolant and to reduce down time. CONSTITUTION: A blade(120) cuts an ingot. A plurality of rollers rotates the blade. A plurality of nozzles sprays a cleansing solution on the blade. A plurality of constant pressure units are arranged at both sides of the blade. A distance measuring sensor measures the distance between the blade and the constant pressure unit. A control device controls the amount of sprayed cleansing liquid at each nozzle according to the measured distance.
申请公布号 KR20110080338(A) 申请公布日期 2011.07.13
申请号 KR20100000514 申请日期 2010.01.05
申请人 LG SILTRON INCORPORATED 发明人 KIM, WOO TAE;KIM, YUN IL;NA, GWANG HA
分类号 H01L21/20 主分类号 H01L21/20
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