发明名称 Semiconductor constructions
摘要 Some embodiments include methods of reflecting ions off of vertical regions of photoresist mask sidewalls such that the ions impact foot regions along the bottom of the photoresist mask sidewalls and remove at least the majority of the foot regions. In some embodiments, trenches may be formed adjacent the photoresist mask sidewalls in a material that is beneath the photoresist mask. Another material may be formed to have projections extending into the trenches. Such projections may assist in anchoring said other material to the material that is beneath the photoresist mask. In some embodiments, the photoresist mask is utilized for patterning flash memory structures. Some embodiments include semiconductor constructions having materials anchored to underlying materials through fang-like projections.
申请公布号 US7977727(B2) 申请公布日期 2011.07.12
申请号 US20100687735 申请日期 2010.01.14
申请人 MICRON TECHNOLOGY, INC. 发明人 KIEHLBAUCH MARK
分类号 H01L29/788 主分类号 H01L29/788
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