摘要 |
PROBLEM TO BE SOLVED: To provide a generator which further improves the power generation properties. SOLUTION: The generator 100 includes a gap-adjusting layer 35 (36), which is arranged between a movable-part holding plate 30 (31) and a silicon substrate 37 (38), and adjusts an inter-electrode gap (L1) between a power collection electrode 6 (13) and an electret 39 (40). COPYRIGHT: (C)2011,JPO&INPIT
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