| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus for manufacturing an aluminum nitride single crystal that suppresses peeling and falling of a seed crystal from an inner wall of a crucible during crystal growth and can manufacture an aluminum nitride single crystal of good crystallinity. SOLUTION: The apparatus 1 for manufacturing an aluminum nitride single crystal is equipped with an upper opening, the crucible 11 to hold a raw material 12 at its bottom, a lid 13 installed near the upper opening, a seed substrate 14 installed on the bottom side of the lid 13 so as to face the raw material 12 and a seed substrate supporter 15 which is installed under the seed substrate 14 so as to touch at least a part of the periphery of the seed substrate 14 and has a through-hole of a diameter smaller than that of the seed substrate 14 at the center, wherein the seed substrate 14 is supported by the seed substrate supporter 15. COPYRIGHT: (C)2011,JPO&INPIT
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