| 摘要 |
<p>PURPOSE: A method for transferring a substrate is provided to reduce transfer time by decreasing the reciprocating distance of a gripping member. CONSTITUTION: A substrate floated by a floating stage is transferred to a slit nozzle(S120). The substrate is absorbed to be fixed and is transferred to an alignment position(S130,S140). The posture of the substrate is aligned(S150). One or both sides of the substrate are gripped by a gripping member(S160). The surface of the substrate is coated with chemical solutions from the slit nozzle while a substrate transfer unit transfers the substrate(S170).</p> |
