| 摘要 |
PROBLEM TO BE SOLVED: To provide a new measurement method and apparatus, capable of accurately measuring a three-dimensional shape of a measurement object by using a phase shift method and a spatial coding method. SOLUTION: When using the spatial coding method, first and second spatial code patterns in which bright and dark boundaries are shifted by +π/2, -π/2 from a boundary of each period of a fringe pattern are used. The phase connection is performed by using the first spatial code pattern when a relative phaseϕof a pixel obtained by the phase shift method satisfies 0<ϕ<+πand by using the second spatial code pattern when it satisfies -π<ϕ<0. COPYRIGHT: (C)2011,JPO&INPIT
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